Influence of the reactor design in the case of silicon nitride PECVD
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Reference19 articles.
1. Excimer laser photochemistry of silane-ammonia mixtures at 193 nm;Beach;J. Phys. Chem.,1990
2. Transition between different regimes of rf glow discharge;Belenguer;Phys. Rev. A,1990
3. Transport Phenomena;Bird,1960
4. Reactor modeling for radio frequency plasma deposition of SiNxHy: comparison between two reactor designs;Caquineau;J. Vac. Sci. Technol. A,1996
5. Mass transfer analyses of plasma deposition process;Chen;Thin Solid Films,1983
Cited by 27 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Multi-field simulation and optimization of SiNx:H thin-film deposition by large-size tubular LF-PECVD;Solar Energy;2021-11
2. Analysis of thermal diffusion effects observed in a capacitively coupled plasma deposition reactor with non-isothermal walls;Vacuum;2021-05
3. Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes;Optics Express;2020-10-23
4. Study on effect of process and structure parameters on SiNxHy growth by in-line PECVD;Solar Energy;2020-03
5. Parametric study and residual gas analysis of large-area silicon-nitride thin-film deposition by plasma-enhanced chemical vapor deposition;Vacuum;2019-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3