Multi-field simulation and optimization of SiNx:H thin-film deposition by large-size tubular LF-PECVD-Reference-Cited by-同舟云学术

Multi-field simulation and optimization of SiNx:H thin-film deposition by large-size tubular LF-PECVD

Published:2021-11 Issue: Volume:228 Page:575-585
ISSN:0038-092X
Container-title:Solar Energy
language:en
Short-container-title:Solar Energy

Author:

Zhou Jicheng^ORCID,Huang Jing,Liao Jia,Guo Yan,Zhao Zengchao,Liang Huiling

Publisher

Elsevier BV

Subject

General Materials Science,Renewable Energy, Sustainability and the Environment

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