Author:
Li Lanlan,Hu Song,Zhao Lixin,Ma Ping,Li Jinlong,Zhong Lingna
Funder
National Natural Science Foundation of China
National High Technology Research and Development Program of China
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Single closed fringe pattern phase demodulation in alignment of nanolithography;Xu;Optik,2013
2. Position control in lithographic equipment—an enable for current-day chip manufacturing;Butler;IEEE Contr. Syst. Mag.,2011
3. Scanning stage technology for exposure tools;Butler;Microlithogr. World,1999
4. Performance of a step-and-scan system for DUV lithography;deZwart;Proc. SPIE,1997
5. Optimum synchronous control for multiple-axis servo systems in terms of time-varying performance index;Miyoshi;IEEE Ind. Electron. Soc.,2000
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献