面向IC光刻的超精密运动台控制技术
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Published:2022
Issue:9
Volume:59
Page:0922013
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Liu Yang 刘杨,Li Li 李理,Chen Siwen 陈思文,Tan Jiubin 谭久彬
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics