Two-dimensional optical micro-scanner on silicon technology-Reference-Cited by-同舟云学术

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Two-dimensional optical micro-scanner on silicon technology

Published:2010-05 Issue:9 Volume:121 Page:843-846
ISSN:0030-4026
Container-title:Optik
language:en
Short-container-title:Optik

Author:

Molar-Velázquez Gabriela,Renero-Carrillo Francisco J.,Calleja-Arriaga Wilfrido

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Modern Optical Engineering: The Design of Optical Systems;Smith,1990

2. Elements of Modern Optical Design;O’Shea,1985

3. Handbook of Optical and Laser Scanning;Marshall,2004

4. Introduction to Geometrical Optics;Katz,2002

5. Fundamentals of Micro-fabrication: The Science of Miniaturization;Madou,2002

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Arrayed silicon-based concave microlens fabricated by single mask ultraviolet-photolithography and dual-step KOH etching;Journal of Optical Microsystems;2022-04-07

2. Fabrication of ZnSe Microlens Array for a Wide Infrared Spectral Region;IEEE Photonics Technology Letters;2020-10-15

3. Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo;International Journal of Machine Tools and Manufacture;2017-04

4. Dry-etching-assisted femtosecond laser machining;Laser & Photonics Reviews;2017-03-29

5. Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching;Chinese Optics Letters;2016

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