Dry-etching-assisted femtosecond laser machining-Reference-Cited by-同舟云学术

Dry-etching-assisted femtosecond laser machining

Published:2017-03-29 Issue:3 Volume:11 Page:1600115
ISSN:1863-8880
Container-title:Laser & Photonics Reviews
language:en
Short-container-title:Laser & Photonics Reviews

Author:

Liu Xue-Qing¹,Chen Qi-Dai¹,Guan Kai-Min¹,Ma Zhuo-Chen¹,Yu Yan-Hao¹,Li Qian-Kun¹,Tian Zhen-Nan¹,Sun Hong-Bo¹²

Affiliation:

1. State Key Laboratory on Integrated Optoelectronics College of Electronic Science and Engineering Jilin University; 2699 Qianjin Street Changchun 130012 P.R. China

2. College of Physics; Jilin University; 119 Jiefang Road Changchun 130023 P.R. China

Funder

National Natural Science Foundation of China

National Basic Research Program of China

Publisher

Wiley

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Multiphoton Fabrication

2. Advances in 3D nano/microfabrication using two-photon initiated polymerization

3. Miniature chiral beamsplitter based on gyroid photonic crystals

4. Nanoscale Electronics: Digital Fabrication by Direct Femtosecond Laser Processing of Metal Nanoparticles

5. Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses

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