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Advances in 3D nano/microfabrication using two-photon initiated polymerization

  • Published:2008-06 Issue:6 Volume:33 Page:631-681
  • ISSN:0079-6700
  • Container-title:Progress in Polymer Science
  • language:en
  • Short-container-title:Progress in Polymer Science

Author:

Lee Kwang-Sup,Kim Ran Hee,Yang Dong-Yol,Park Sang Hu

Publisher

Elsevier BV

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics,Surfaces and Interfaces,Ceramics and Composites

Reference181 articles.

1. Microstereolithography: a review;Bertsch;Mater Res Soc Symp Proc,2003

2. Soft lithography;Xia;Angew Chem Int Ed,1998

3. EFAB: rapid, low-cost desktop micromachining of high aspect ratio true 3-D MEMS;Cohen;Proc IEEE MEMS,1999

4. Three-dimensional microfabrication by localized electrochemical deposition;Madden;J Microelectromech Syst,1996

5. Combining microstereolithography and thick resist UV lithography for 3D microfabrication;Bertsch;Proc IEEE MEMS,1998

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