Author:
Raid Indek,Eifler Matthias,Kusnezowa Tatjana,Seewig Jörg
Funder
German Science Foundation (DFG)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Optical topometry of surfaces with locally changing materials, layers and contaminations, Part 1: Topographic methods based on two-beam interferometry;Leonhardt;J. Mod. Opt.,1999
2. Coherence-scanning interferometry;de Groot,2011
3. Interferometry for Ellipso-Height-Topometry, Part 1: Coherence scanning on the base of spatial coherence;Leonhardt;Optik,2003
4. Interferometry for ellipso-height-topometry, Part 2: Measurement of the ellipsometric data, material identification, and correction of the measured height;Leonhardt;Optik,2010
5. Ellipsometry and Polarized Light;Azzam,1987
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