Investigation into electrochemical oxidation behavior of 4H-SiC with varying anodizing conditions
Author:
Publisher
Elsevier BV
Subject
Electrochemistry
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1. Discrimination of dislocation in highly doped n-type 4H–SiC by combining electrochemical reaction and molten alkali etching;Materials Science in Semiconductor Processing;2024-12
2. Localized anodization of 4H–SiC by electrochemical etching with constant current mode in KOH solutions;Micro and Nanostructures;2023-11
3. Electrochemically-stimulated nanoscale mechanochemical wear of silicon;Friction;2023-06-22
4. Electrochemical etching modes of 4H-SiC in KOH solutions;Semiconductor Science and Technology;2023-04-13
5. Phenomena and mechanism of local oxidation microlithography of 4H–SiC via electrochemical jet anodisation;Ceramics International;2023-03
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