A new seeding and electroless approach to alloying, direct patterning, and self-forming barriers for Cu thin-film nanostructures
Author:
Publisher
Elsevier BV
Subject
Electrochemistry
Reference24 articles.
1. The International Technology Roadmap for Semiconductors, International Technology Roadmap for Semiconductors,2009
2. On the use of alloying elements for Cu interconnect applications
3. A self-passivated Cu(Mg) gate electrode for an amorphous silicon thin-film transistor
4. Low leakage current Cu(Ti)/SiO2 interconnection scheme with a self-formed TiOx diffusion barrier
5. Interfacial phase formation in Cu–Mg alloy films on SiO2
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Enhancement of Electromigration Reliability of Electroless-Plated Nanoscaled Copper Interconnects by Complete Encapsulation of a 1 nm-Thin Self-Assembled Monolayer;Journal of The Electrochemical Society;2022-08-01
2. Enhancement of seeding for electroless Cu plating of metallic barrier layers by using alkyl self-assembled monolayers;Applied Surface Science;2017-05
3. Electroless Deposition of Copper-Manganese for Applications in Semiconductor Interconnect Metallization;Journal of The Electrochemical Society;2016
4. Enhancement of Seeding and Electroless Cu Plating on TaN Barrier Layers: The Role of Plasma Functionalized Self-Assembled Monolayers;Journal of The Electrochemical Society;2016
5. Electroless plating of low-resistivity Cu–Mn alloy thin films with self-forming capacity and enhanced thermal stability;Journal of Alloys and Compounds;2015-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3