HRTEM and EELS study of Y2O3/MgO thin films
Author:
Publisher
Elsevier BV
Subject
Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science
Reference18 articles.
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4. Direct heteroepitaxy of crystalline Y2O3 on Si (001) for high-k gate dielectric applications;Dimoulas;J. Appl. Phys.,2001
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