Electron beam-induced crystallization of Al2O3 gate layer on β-Ga2O3 MOS capacitors

Author:

Klingshirn Christopher J.,Jayawardena Asanka,Dhar Sarit,Ramamurthy Rahul P.,Morisette DallasORCID,Warecki Zoey,Cumings JohnORCID,Zheleva Tsvetanka,Lelis Aivars,Salamanca-Riba Lourdes G.ORCID

Funder

.S. Army Research Laboratory

Publisher

Elsevier BV

Subject

Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science

Reference33 articles.

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3. Extracting information from sequences of spatially resolved EELS spectra using multivariate statistical analysis;Bonnet;Ultramicroscopy,1999

4. Unmixing noisy co-registered spectrum images of multicomponent nanostructures;Braidy;Sci. Rep.,2019

5. hyperspy/hyperspy v1.2;de la Peña,2017

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