Author:
Lee J.Y.,Clark W.M.,Utlaut M.W.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Focused Ion Beams;Handbook of Charged Particle Optics, Second Edition;2008-10-24
2. Applications of Focused Ion Beams;High Resolution Focused Ion Beams: FIB and its Applications;2003
3. Ion Lithography and Focused Ion Beam Implantation;Handbook of Vlsi Microlithography;1991