A study of Pd2Si films on silicon using Auger electron spectroscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Formation of vanadium silicides by the interactions of V with bare and oxidized Si wafers
2. Crystallization of Ge and Si in metal films. I
3. Palladium silicide formation observed by Auger electron spectroscopy
4. Formation kinetics and structure of Pd2Si films on Si
5. Alloying of thin palladium films with single crystal and amorphous silicon
Cited by 45 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. In situ high-temperature X-ray diffraction analysis of Mg2Si formation kinetics via reaction of Mg films with Si single crystal substrates;Intermetallics;2018-03
2. The distribution of the barrier height in Al–TiW–Pd2Si/n-Si Schottky diodes fromI–V–Tmeasurements;Semiconductor Science and Technology;2008-01-31
3. Enhancement in the crystalline quality of palladium silicide films: multiple versus single deposition;Journal of Crystal Growth;2000-11
4. In situ, real-time RBS measurement of solid state reaction in thin films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-04
5. Diffusion Synthesis of Silicides in Thin-Film Metal—Silicon Structures;Rapid Thermal Processing of Semiconductors;1997
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3