Crystallization of Ge and Si in metal films. I
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1663483
Reference20 articles.
1. SLT Device Metallurgy and its Monolithic Extension
2. Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits
3. Effect of Deposited Metals on the Crystallization Temperature of Amorphous Germanium Film
4. The influence of contact materials on the conduction crystallization temperature and electrical properties of amorphous germanium, silicon and boron films
5. Metal contact induced crystallization in films of amorphous silicon and germanium
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2. Formation of ultrathin segregated-Ge crystal on Al/Ge(111) surface;Japanese Journal of Applied Physics;2020-02-28
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