Four-point probe measurement of non-uniformities in semiconductor sheet resistivity
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. The Potentials of Infinite Systems of Sources and Numerical Solutions of Problems in Semiconductor Engineering
2. Cross-sectional resistivity variations in germanium single crystals
3. Minute Resistivity Variations in Germanium Crystals and Their Effect on Devices
4. An AC Bridge for Semiconductor Resistivity Measurements Using a Four-Point Probe
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