Author:
Kamins T.I.,Lee K.F.,Gibbons J.F.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Silicon-on-insulator m.o.s.f.e.t.s fabricated on laser-annealed polysilicon on SiO2
2. cw laser anneal of polycrystalline silicon: Crystalline structure, electrical properties
3. Applications of Scanning cw Lasers and Electron Beams in Silicon Technology;Gibbons,1980
4. Proc. Symp. on Laser and Electron Beam Processing of Electronic Materials;Gibbons,1980
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