Laser Fabrication of Integrated Circuits
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Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-642-82381-7_53.pdf
Reference93 articles.
1. S. K. Ghandi: VLSI Fabrication Principles (Wiley, New York 1983)
2. D. J. Elliot: Integrated Circuit Applications (McGraw-Hill, New York 1982)
3. T. P. Chow and A. J. Steckl: IEEE Electr. Dev. 30, 1480 (1983)
4. K. C. Saraswat, D. L. Brors, J. A. Fair, K. A. Monnig and R. Beyers: IEEE Electr. Dev. 30, 1497 (1983)
5. R. M. Osgood, Jr: Ann. Rev. Phys. Chem. 34, 77 (1983)
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