Silicon-on-insulator m.o.s.f.e.t.s fabricated on laser-annealed polysilicon on SiO2

Author:

Tasch A.F.,Holloway T.C.,Lee K.F.,Gibbons J.F.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Reference6 articles.

1. Grove, A.S.: Physics and technology of semiconductor devices, (Wiley, New York 1967),chap. 11,

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