Effect of oxidation-induced positive charges on the kinetics of silicon oxidation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Characteristics of the Surface-State Charge (Qss) of Thermally Oxidized Silicon
2. The Current Understanding of Charges in the Thermally Oxidized Silicon Structure
3. Effect of an Electric Field on Silicon Oxidation
4. General Relationship for the Thermal Oxidation of Silicon
5. An18O study of the thermal oxidation of silicon in oxygen
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