An18O study of the thermal oxidation of silicon in oxygen
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90771
Reference9 articles.
1. General Relationship for the Thermal Oxidation of Silicon
2. Molecular diffusion and solubility of hydrogen isotopes in vitreous silica
3. Silicon Oxidation Studies: Some Aspects of the Initial Oxidation Regime
4. A revised model for the oxidation of Si by oxygen
5. The mechanism of anodic oxidation
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