Novel high brightness miniature electron gun for high current e-beam applications-Reference-Cited by-同舟云学术

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Novel high brightness miniature electron gun for high current e-beam applications

Published:1996-02 Issue:1-4 Volume:31 Page:95-100
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Burstert F.,Winkler D.,Lischke B.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Emission characteristics of the ZrO/W thermal field electron source

2. FEI technical notes.

3. Evaluation and optimisation of a ZrOW electron gun for high current;Weaver,1992

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