Author:
Saini R.,Jandric Z.,Gory I.,Mentink S. A. M.,Tuggle D.
Subject
Electrical and Electronic Engineering,Condensed Matter Physics
Cited by
8 articles.
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1. Electron optics column for a new MEMS-type transmission electron microscope;B POL ACAD SCI-TECH;2018
2. Technology and parameters of thin membrane-anode for MEMS transmission electron microscope;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2018-03
3. Electrostatic microcolumns for surface plasmon enhanced electron beamlets;Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XV;2017-08-25
4. Design and fabrication of electrostatic microcolumn in multiple electron-beam lithography;SPIE Proceedings;2016-03-22
5. Design of electrostatic microcolumn for nanoscale photoemission source in massively parallel electron-beam lithography;Journal of Micro/Nanolithography, MEMS, and MOEMS;2015-12-18