Technology and parameters of thin membrane-anode for MEMS transmission electron microscope-Reference-Cited by-同舟云学术

Technology and parameters of thin membrane-anode for MEMS transmission electron microscope

Published:2018-03 Issue:2 Volume:36 Page:02C107
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Krysztof Michał¹,Grzebyk Tomasz¹,Szyszka Piotr¹,Laszczyk Karolina¹,Górecka Drzazga Anna¹,Dziuban Jan¹

Affiliation:

1. Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Janiszewskiego Str. 11/17, 50-372 Wroclaw, Poland

Funder

Wroclaw University of Science and Technology

Narodowe Centrum Nauki

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5006151

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