Author:
Cass T.R.,Hendricks D.,Jau J.,Dohse H.J.,Brodie A.D.,Meisburger W.D.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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3. Testing integrated circuit microstructures using charging-induced voltage contrast
4. Proceedings of the 30th IEEE Reliability Physics Symposium;Jenkins,1992
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