1. The high variety of image wafer inspection field;Fourteenth International Conference on Machine Vision (ICMV 2021);2022-03-05
2. Notes and References;Principles of Electron Optics;2018
3. Proposed architecture of a multicolumn electron-beam wafer inspection system for high-volume manufacturing;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-11
4. High-brightness miniature column for high-speed multicolumn wafer inspection;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-11
5. On the limits of miniature electron column technology;SPIE Proceedings;2014-09-16