The design of a multi-channel time-dispersion voltage contrast detector-Reference-Cited by-同舟云学术

The design of a multi-channel time-dispersion voltage contrast detector

Published:1990-05 Issue:1-4 Volume:12 Page:227-234
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Khursheed A.,Dinnis A.R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. In-the-lens secondary electron analyser for IC internal voltage measurements with electron beams

2. High performance electron optical column for testing ICs with submicrometer design rules

3. Magnetic field paralleliser for 2π electron-spectrometer and electron-image magnifier

4. An in-the-lens spectrometer for high performance E-beam testing

5. Advanced deflection concept for large area, high resolution e‐beam lithography

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2. Multi-channel vs. conventional retarding field spectrometers for voltage contrast;Microelectronic Engineering;1992-03

3. The time-of-flight voltage contrast spectrometer: first results;Microelectronic Engineering;1992-03

4. Secondary electron energy analyzers for electron-beam testing;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1990-12