An in-the-lens spectrometer for high performance E-beam testing-Reference-Cited by-同舟云学术

An in-the-lens spectrometer for high performance E-beam testing

Published:1987-01 Issue:2-4 Volume:7 Page:155-161
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Garth S.C.J.,Sackett J.N.,Spicer D.F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Electron beam testing of operating integrated circuits;Menzel;Solid State Technology,1985

2. Stroboscopic testing of LSIs with LVSEM;Todokoro,1984

3. Magnetic field Paralleliser for Electron Spectrometer and Electron Image Magnifier;Kruit;J. Phys. E.: Sci. Instr.,1982

4. Magnetic field extraction of secondary electrons for accurate integrated circuit voltage measurement;Garth;J. Vac. Sci. Technol. B,1985

5. Electron spectrometers for waveform measurement on ULSI integrated circuits;Garth;Scanning Electron Microscopy,1986

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