The time-of-flight voltage contrast spectrometer: first results-Reference-Cited by-同舟云学术

The time-of-flight voltage contrast spectrometer: first results

Published:1992-03 Issue:1-4 Volume:16 Page:35-42
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Dinnis A.R.,Khursheed A.,Smart P.D.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. VLSI testing using the electron probe;Feuerbaum,1979

2. A voltage contrast detector with two energy channels;Dubbeldam;Microlectronic Engineering,1990

3. Khursheed A: “Multi-channel vs conventional ratarding field spectrometers for voltage contrast”, this Conference, Paper 49

4. A multichannel time-dispersion voltage contrast detector;Khursheed;J. Vac. Sci. Technol.,1989

5. The design of a multi-channel time-dispersive voltage contrast detector;Khursheed;Microelectronic Engineering,1990

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1. A high-resolution time-dispersive electron spectrometer for fast voltage-contrast measurements;Microelectronic Engineering;1996-02

2. Voltage contrast maps using the time-dispersive electron spectrometer;Microelectronic Engineering;1995-02

3. Voltage measurements using the time-of-flight electron spectrometer;Microelectronic Engineering;1994-03

4. Crosstalk effect in electron beam testing: Simulations and measurements;Microelectronic Engineering;1994-03

5. Voltage measurements on integrated circuits using a time-of-flight electron spectrometer;Microelectronic Engineering;1994-01