A multichannel time-dispersion voltage contrast detector-Reference-Cited by-同舟云学术

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A multichannel time-dispersion voltage contrast detector

Published:1989-11 Issue:6 Volume:7 Page:1908
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Khursheed A.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Scanning electron microscope design for quantitative multicontrast;Scanning;1996-03

2. Time-of-flight electron spectrometer for voltage measurements on integrated circuits;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1993-11

3. Principles and Applications;Electron Beam Testing Technology;1993

4. The time-of-flight voltage contrast spectrometer: first results;Microelectronic Engineering;1992-03

5. A theoretical comparison of the data-acquisition time characteristics of the time of flight voltage contrast detector with retarding field detectors;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1990-11

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