Author:
Guillaume M.E.,Noailly N.,Pichot M.,Buevoz J.L.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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5. M.A.L.T.: Nouvelle methode de Mesure Automatique de Largeur de Traits pour lamicroélectronique;Noailly,1985
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