Author:
Arima Hideaki,Matsukawa Takayuki,Mitsuhashi Junichi,Morimoto Hiroaki,Nakata Hidefumi
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Quantitative measurement with high time resolution of internal wave forms on MOS using a modified scanning electron microscope;Feuerbaum;IEEE J. Solid State Circuits,1978
2. Electron-beam testing of VLSI circuits;Wolfgang;IEEE J. Solid State Circuits,1979
3. Resolution of MOS one-transistor dynamic RAM bit failures using SEM stroboscopic techniques;Gonzales;J. Vac. Sci. Technol.,1978
4. Internal testing of microprocessor chips using electron beam techniques;Wolfgang;IEEE ICCC-80,1980
5. Function testing of bipolar and MOS LSI circuits with a combined stroboscopic SEM-microcomputer system;Fujioka;IECE Japan,1981
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