Electron-beam testing of VLSI circuits-Reference-Cited by-同舟云学术

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Electron-beam testing of VLSI circuits

Published:1979-04 Issue:2 Volume:14 Page:471-481
ISSN:0018-9200
Container-title:IEEE Journal of Solid-State Circuits
language:en
Short-container-title:IEEE J. Solid-State Circuits

Author:

Wolfgang E.,Fazekas P.,Feuerbaum H.-P.,Lindner R.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering

Link

http://xplorestaging.ieee.org/ielx5/4/22564/01051199.pdf?arnumber=1051199

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5. Fabrication of an integrated microprobing head for fault analysis of mos integrated circuits;Sensors and Actuators;1988-06

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