Author:
Gonzales A. J.,Powell M. W.
Cited by
8 articles.
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1. Electron Beam Testing;Advances in Electronics and Electron Physics;1989
2. EBT-1: A highly automated, practical electron beam tester;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-11
3. Electron beam testing of VLSI circuits assisted by focused ion beam etching;Microelectronic Engineering;1986-12
4. Electron beam prober for VLSI diagnosis;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1985-05
5. Voltage contrast: A powerful tool for VLSI circuit diagnosis;Proceedings, annual meeting, Electron Microscopy Society of America;1983-08