Overlay measurement using the low voltage scanning electron microscope-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Overlay measurement using the low voltage scanning electron microscope

Published:1992-03 Issue:1-4 Volume:17 Page:439-444
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Rosenfield M.G.,Starikov A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Accuracy of overlay measurements: tool and mark asymmetry effects

2. Analysis Of Linewidth Measurement Techniques Using The Low Voltage SEM

3. Electron-beam metrology and inspection

4. Measurement techniques for submicron resist images

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanoporous Al₂O₃Assisted Anodizing of WTi Alloy;2024 IEEE 24th International Conference on Nanotechnology (NANO);2024-07-08

2. Porous Alumina Assisted Anodizing of Ti/Nb Layers;2024 IEEE 24th International Conference on Nanotechnology (NANO);2024-07-08

3. REFLECTANT PHOTONIC CRYSTALS PRODUCED VIA POROUS-ALUMINA-ASSISTED-ANODIZING OF Al/Nb AND Al/Ta SYSTEMS;Surface Review and Letters;2021-05-06

4. Review of scanning electron microscope-based overlay measurement beyond 3-nm node device;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-06-13

5. Nanoscale subsurface imaging;Journal of Physics: Condensed Matter;2017-03-24

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP