Author:
Claβen A.,Kuhn S.,Straka J.,Forchel A.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. Nanolithography at 350 KV in a TEM
2. Microposit SAL 600/601 e-beam process, Shipley Co., Newton, MA, USA.
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