An integrated electron-beam probing environment with a simulation interface and CAD navigation-Reference-Cited by-同舟云学术

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An integrated electron-beam probing environment with a simulation interface and CAD navigation

Published:1994-03 Issue:1-4 Volume:24 Page:287-294
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Ng William

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. E-Beam Probing for LSI Circuit Debug;Richardson;VLSI Systems Design,1987

2. Engineering a Device for Electron-Beam Probing;Lee;IEEE Design & Test of Computers,1989

3. E-Beam Probing Systems: Filling the Submicron Gap;Iscoff;Semiconductor International,1985

4. Electron Beam Testing;Wolfgang;Microelectronic Engineering,1986

5. An Improved Magnetic-Collimating Secondary Electron Energy Filter for Very Large Scale Integrated Diagnostics;Richardson;J. Vac. Sci. Technol. B,1988

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Indoor Navigation;Universal Navigation on Smartphones;2011

2. Faster fault isolation using a dichotomy reduction of node candidates;Microelectronics Reliability;2000-08

3. LayDis — an advanced navigation system for electron beam probing;Microelectronic Engineering;1996-02

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