LayDis — an advanced navigation system for electron beam probing-Reference-Cited by-同舟云学术

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LayDis — an advanced navigation system for electron beam probing

Published:1996-02 Issue:1-4 Volume:31 Page:355-362
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Kuntzsch C.,Goldbach M.,Wolz W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. GDSII Stream Format Manual;Calma;Documentation No.: B97E060 Release 6.0,1987

2. An E-beam Prober Based VLSI Device Characterization System;Cundall,1991

3. New Approach to integrate LSI Design Databases with E-Beam Tester;Hu,1990

4. KLA Knights Excalibur: Merlin's Workbench; User Manual

5. Automatic Location of IC Design Errors Using An E-Beam System;Melgara,1988

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