Electron beam testing-Reference-Cited by-同舟云学术

Electron beam testing

Published:1986-12 Issue:2 Volume:4 Page:77-106
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Wolfgang E.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference80 articles.

1. The examination of p-n junctions with the scanning electron microscope;Oatley;J. Electron,1957

2. Stroboscopic scanning electron microscopy;Plows;J. Phys. E: Sci. Instr.,1968

3. Voltage measurement in the SEM;Wells;J. Phys. E.,1968

4. Voltage coding: Temporal versus spatial frequencies;Lukianoff,1975

5. Internal waveform measurements of the MOS three transistor, dynamic RAM using SEM stroboscopic techniques;Gonzales;Tech. Digest of IEDM,1975

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