Author:
Kholkin A.,Colla E.,Brooks K.,Muralt P.,Kohli M.,Maeder T.,Taylor D.,Setter N.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Proc. 7th Conf. On Solid State Sensors and Actuators;Schiller,1993
2. PZT films for micro-pumps
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