Author:
Grimm Jürgen,Trube Jutta,Huber Hans-Ludwig
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Crirical dimension control in X-ray masks with electroplated gold absorbers
2. J. Grimm, J. Trube, J. Chlebek, H.-L. Huber, to be published.
3. J. Trube, Ph.D. Thesis
Cited by
3 articles.
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