Author:
Meyer W.H.,Curtis B.J.,Brunner H.R.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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5. The physics and chemistry of the lithographic process;Bowden;J. Electrochem. Soc.,1981
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12 articles.
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