Plasma properties at the transition from remote to direct plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Indirect plasma deposition of silicon dioxide;Meiners;J. Vac. Sci. Technol.,1982
2. Plasma enhanced chemical vapor deposition: Differences between direct and remote plasma excitation;Lucovsky;J. Vac. Sci. Technol. A,1987
3. Remote plasma-enhanced chemical vapour deposition with metal organic source gases: principles and applications;Kulisch;Surf. Coat. Technol.,1993
4. A. Sekiguchi. Induction heated plasma assisted chemical vapor deposition of SiN;Mito;J. Vac. Sci. Technol.,1986
5. Remote plasma enhanced CVD deposition of silicon nitride and oxide for gate insulators in (In, Ga)As FET devices;Richard;J. Vac. Sci. Technol. A,1985
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Study of a pulsed post‐discharge plasma deposition process of APTES: synthesis of highly organic pp‐APTES thin films with NH 2 functionalized polysilsesquioxane evidences;Plasma Processes and Polymers;2019-01-25
2. Effect of plasma duty cycle on silver nanoparticles loading of cotton fabrics for durable antibacterial properties;Journal of Applied Polymer Science;2014-08-02
3. Influence of plasma duty cycle during plasma polymerization in adhesive bonding;International Journal of Adhesion and Adhesives;2011-09
4. Preparation of collagen-coated electrospun nanofibers by remote plasma treatment and their biological properties;Journal of Biomaterials Science, Polymer Edition;2007-01
5. Using beam flux monitor as Langmuir probe for plasma-assisted molecular beam epitaxy;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2005-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3