Study of a pulsed post‐discharge plasma deposition process of APTES: synthesis of highly organic pp‐APTES thin films with NH 2 functionalized polysilsesquioxane evidences
Author:
Affiliation:
1. MRT DepartmentLuxembourg Institute of Science and Technology5 avenue des Hauts‐FourneauxL‐4362Esch/AlzetteLuxembourg
2. Institut Jean Lamour, UMR CNRS 7198Université de LorraineNANCYF‐54011France
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.201800177
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