Low temperature coating of aluminium alloys by plasma-CVD using metallo-organic compounds
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference21 articles.
1. Investigation of PA-CVD of TiN: Relations between process parameters, spectroscopic measurements and layer properties
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4. Proc. of 9. Int. Conf. CVD 1984;Kikuchi,1984
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