Author:
Sanders F.H.M.,Verspui G.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference11 articles.
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2. Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel
3. Proc. 6th Int. Conf. on Ion and Plasma Assisted Techniques;Arai,1987
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