Study on plasma assisted metal-organic chemical vapor deposition of Zr(C,N) and Ti(C,N) thin films andin situplasma diagnostics with optical emission spectroscopy
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Published:2008-07
Issue:4
Volume:26
Page:847-853
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Cho S. J.,Nam S.-H.,Jung C.-K.,Jee H.-G.,Boo J.-H.,Kim S.,Han J. G.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics