The tribological and structural characterization of nano-structured Ti–Si–N films coated by pulsed-d.c. plasma enhanced CVD
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference15 articles.
1. Investigation on processing of industrial set-up plasma enhanced chemical vapor deposition with pulsed d.c. power
2. The plasma-assisted chemical vapour deposition of TiC, TiN and TiCxN1−x
3. TiN coatings on M2 steel produced by plasma-assisted chemical vapor deposition
4. Influence of temperature on the growth of TiN films by plasma-assisted chemical vapour deposition
5. The application of hard coatings produced by plasma-assisted chemical vapour deposition
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