Experiments and modelling of combined PVD and CVD processes using a hollow cathode arc discharge plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
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1. Numerical analysis of arc physics and energy transfer under circumferential gas constraint effect;International Journal of Heat and Mass Transfer;2024-04
2. High Power Pulsed Plasma Enhanced Chemical Vapor Deposition: A Brief Overview of General Concepts and Early Results;Physics Procedia;2013
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4. Diagnostics and modeling of a hollow-cathode arc deposition plasma;Surface and Coatings Technology;1999-09
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