Author:
Pedersen Henrik,Larsson Petter,Aijaz Asim,Jensen Jens,Lundin Daniel
Funder
Swedish Innovation Agency
Ångpanneföreningens forskningsstiftelse
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference30 articles.
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3. Chemical Vapour Deposition: Precursors, Processes and Applications;Alexandrov,2009
4. New Hollow Cathode Glow Discharge
5. The hollow cathode: a high-performance tool for plasma-activated deposition
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